EPITAXIAL LAYERS AND MULTILAYERED COMPOSITIONS | |
ArticleName | Study of Electrical Properties of Schottky Diodes Fabricated on Silicon with Different Metal Layers |
ArticleAuthor | I. G. Pashayev |
ArticleAuthorData | Baku State University, Azerbaijan Republic: I. G. Pashayev |
Abstract | We have investigated the fabrication of AuxTi100−x—nSi (where x is 10; 36; 87) and PbxSb100−x—nSi (where x = 52; 70; 87) Schottky diodes and the electrical properties of AuxTi100−x—nSi (where x = 10; 36; 87) and PbxSb100−x—nSi (where x = 52; 70; 87)Schottky diodes. The Au36Ti64, Pb52Sb48 alloy film has an amorphous structure, while the other films are polycrystalline. We have determined Schottky barrier height depending on the composition and structure of the metal films and found that the barrier height is quite sensitive to the composition of the metal alloy. We show that the electrical properties of the AuxTi100−x—nS and PbxSb100−x—nSi Schottky diodes depend on the composition and structure of the metal films. |
keywords | Thermal anneal, amorphous metals, Schottky diodes, alloy film, barrier height |
References | 1. Kung, K. T. Y. Elektrikal charakteristics of amorphorus molyubdenum−nickel contacts to Si / K. T. Y. Kung, I. Suni, M. A. Nikolet // J. Appl. Phys. − 1984. − V. 55, N 10. − P. 3882—3884. 5. Pashaev, I. G. ElektronysikalL properties of schottky diodes made on the basis of silikon wtth amorphous and polycrystaline metal alloy at low direct voltage / I. G. Pashaev // Internat. J. Technical and Physical Problems of Engineering. − 2012. − Iss. 10. − V. 4, N 1. − P. 41—44. |
Language of full-text | russian |
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