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EPITAXIAL LAYERS AND MULTILAYERED COMPOSITIONS
ArticleName Influence of Ge Ion Implantation into Silicon Dioxide/Silicon Structure on Charge Accumulation under Low–Energy Stationary Radiation
ArticleAuthor O. P. Guskova, V. M. Vorotynthev, E. L. Shobolov, N. D. Abrosimova
ArticleAuthorData

Federal State –owned Unitary Enterprize «Federal Science and Production Center Measuring Systems Research Institute named after Yu. Ye. Sedakov»:

O. P. Guskova

E. L. Shobolov

N. D. Abrosimova

 

Nizhny Novgorod, State technical University named after R. E. Alekseev:

V. M. Vorotynthev

Abstract

Results on the influence of Ge ion implantation into pyrogenic SiO2 on radiation charge accumulation are presented. Ge embedding in the silicon dioxide/ silicon system has been analyzed theoretically. We show that Ge ion embedding in the stoichiometric silicon dioxide at the silicon dioxide / silicon interface or forming Ge nanoclusters in the SiO2 bulk provide an energetic advantage.

keywords Radiation hardness, dielectric layer, foreign atom implantation
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